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021-58997868
021-58997868
PRODUCT CENTER
Miniax XYZ Manipulator
The Miniax XYZ translator offers a source of simple, cost effective, manipulation. The single bellows construction makes it easy to use in any orientaion. The micrometers are vacuum conditioned and do not need to be removed for bakeout.
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021-58997868
Schematic 原理图
Features
Single bellows design for mounting in any orientation.
XY travel of ±12.5 mm guided with cross roller bearings.
Z travel options of 50mm or 100mm guided by plain bushes.
Bakeable to 200°C.
XY 1 micron Micrometers are vacuum conditioned.
Full UHV specification.
Compatible with VACGEN sample handling and accessories
The standard base flange is 152mm OD (NW100CF) with straddled clearance holes for mounting the translator.
Four mini ports, tapped M4, are provided for service feedthroughs (152mm OD base flange only)
The travelling flange is 70mm OD (NW35CF) with M6 tapped holes, straddled about the Y axis
An optional 70mm OD (NW35CF) base flange
Double bolt holes on mounting flange.
Operating pressure 1 bar to 10-11 mbar
Leak rate 1x10-10 mbarl-s
XY Resolution 0.001mm repeatability 0.005mm
Z Resolution 0.005mm repeatability 0.010mm
产品参数
