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Omniax XY Stage Module
The Omniax XY module is designed as a standalone single edge welded bellows module which is compatible with Omniax linear shift mechanisms (Z axis) and Rotating platforms such as the RP100, allowing a complete sample manipulator to be created by adding these modules together.
联系电话:
021-58997868
Single edge welded bellows
Full ±25.0mm movement in both the X and Y
54mm clear bore at X and Y full travel
Double bolt holes on mounting flange
Large barrel 5 micron graduations micrometers as standard
Retrofitable Motorisation
Stepper motor with limit switch options
Encoded motors are also available.
Bakeable to 230°C
Operating pressure 1 bar to 10-11 mbar
Leak rate <1x10-10 mbar l-s
10 micron resolution
10 micron repeatability
0.5 micron resolution
0.5 micron repeatability using 4 mm.s-1 maximum speed
产品参数