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Omniax XY Stage Module

Omniax XY Stage Module

The Omniax XY module is designed as a standalone single edge welded bellows module which is compatible with Omniax linear shift mechanisms (Z axis) and Rotating platforms such as the RP100, allowing a complete sample manipulator to be created by adding these modules together.


联系电话:

021-58997868

Schematic


Features

Single edge welded bellows

Full ±25.0mm movement in both the X and Y

54mm clear bore at X and Y full travel

Double bolt holes on mounting flange

Large barrel 5 micron graduations micrometers as standard

Retrofitable Motorisation

Stepper motor with limit switch options

Encoded motors are also available.

Bakeable to 230°C

Operating pressure 1 bar to 10-11 mbar

Leak rate <1x10-10 mbar l-s

 

Manual operation

10 micron resolution

10 micron repeatability

 

Stepper motors

0.5 micron resolution

0.5 micron repeatability using 4 mm.s-1 maximum speed


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