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021-58997868
021-58997868
PRODUCT CENTER
Viewport Shutters
Viewport shutters are used to protect the internal surface of a viewport from build-up of deposition material ejected during thin film processing of substrates. The shutter design is built to allow the widest possible viewing angle, and the maximum level of protection of the viewing area.
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021-58997868
UHV rotary drive with intergrated stop position
Formed internal shield to allow maximum viewing angle and internal surface protection
Easy installation mounted beneath standard VACGEN viewport
| Viewport Shutter | ||||
| DN | Length mm (A) | Flange OD mm (B) | Order Code and Step File | Price |
| DN40 | 152 | 69 | ZVPS40 | POA |
| DN63 | 197 | 114 | ZVPS63 | POA |
| DN100 | 235 | 152 | ZVPS100 | POA |
| DN150 | 285 | 202 | ZVPS150 | POA |
| DN200 | 323 | 253 | ZVPS200 | POA |
Prices quoted are Ex-works, UK site.
| Technical Data for Viewport Shutter | |
| Shutter | Stainless steel |
| Mounting seal | OFHC gasket (Both side) |
| Operate pressure range | 760 Torr - 1x10-10 Torr, 1,000 mbar - 1.33x10-10 mbar, 100 kPa - 1.13x10-9 kPa |
| Leak rate | 1 x 10-10 Torr l/s, He,1.33x10-10 mbar l/s, He,1.13x10-9 kPa |
| Temperature Range | 0°C - 200°C |
| Bake Temperature | 250°C |
| Body material | 304L |
| Feedthrough | UHV Rotary Drive |
| Mounting position | Any |
产品参数
