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021-58997868
021-58997868
PRODUCT CENTER
MD5 Series
VACGEN MD5 series leak valves are used to precise control flow of gas into a vacuum system from an external source and operates in a high vacuum range.
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021-58997868
Valve can withstand hot or corrosive gases
High inlet pressure (up to 10 bar)
Low internal volume
User serviceable
Operating pressure range from 1 bar to 10-7 mbar
Bakeable to 450°C
UHV compatible
304L stainless steel body with Nickel sealing disc
The MD5 Series uses a stellite-faced knife edge and nickel diaphragm to make the UHV seal.
These materials give this valve the properties of being able to both withstand hot or corrosive materials and make it capable of handling high inlet pressures of up to 10 bar for high stability.
MD Schematic
MD9538 Schematic
| All Metal Right Angled Leak Valves (MD5 Series) | ||||||||||||
| DN Type | OD FlangeAxial mm | OD Flange Radial mm | Max Inlet Pressure | Operating Pressure Max | Operating Pressure Min | Open Conductance ls-1 | Closed Leak Rate mbar.l.s-1 | Bakeout Temp °C Open | Bakeout Temp °C Closed | A offset mm | Order Code | Price |
| DN19 | 34 (Tapped base flange) | 34 | 10 bar | 1 bar | 1 x 10-7 mbar | 0.1 | 1x10-12 | 450°C* | 250°C* | 6.5 | ZMD95 | POA |
| DN40 | 70 (Clear base flange) | 34 | 10 bar | 1 bar | 1 x 10-7 mbar | 0.1 | 1x10-12 | 450°C* | 250°C* | 18 | ZMD9538 | POA |
产品参数
