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021-58997868
021-58997868
PRODUCT CENTER
Transax Z Slide Modules
The Transax Z axis linear shift mechanism is a single bellows stand alone module, with a hinged NW40CF (70mmOD) top flange, two guide shafts positioned each side of the drive screw, encased in a strengthening outer shell to prevent twisting. This structure coupled with cast and precision machined flange supports allows the device to offer stability.
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021-58997868
Edge welded bellows
Z travel ranges are 150, 300 and 450 mm
Feedthrough chamber with 3 radial mini ports
Clear bore of 33mm (without support tube) for larger bore Z only translations.
Optional worm drive for longer travels, recommended for 450 translators
Linear motion: Handwheel 1 turn provides 2mm travel
Motorised Z travel: stepper with limit switches option
Top flange is 70mm OD Conflat tapped
Mounting flange is 70mm OD Conflat
Bakeout temperature to 230°C fully assembled (motors and switches removed)
Any mounting orientation
Manual operation; 10 micron resolution: repeatability 10 micron.
Stepper motor operation; 5 micron resolution: repeatability 5 micron.
Maximum motorised speed 10mm/sec
Operating pressure 1 bar to 10-11 mbar
Leak rate <1x10-10 mbar l-s
| Z Slide Modules and Accessories | |
| Travel Range mm | Order Code |
| 150 | MTXZ15 |
| 300 | MTXZ30 |
| 450 | MTXZ45 |
| 600 | MTXZ60 |
| Worm Drive Upgrade (not available for MTXZ15) | ZTRWD |
| Z Axis Stepper Motor | ZTRSMKW |
| Z Axis Stepper Motor and Encoder | ZTRSMKE |
| Z Axis DC Motor | ZTRDCMK1 |
| Transax Z-slide - Technical Data | |
| Parameter | Specification |
| Resolution - Manual | 10 microns |
| Resolution - Motorised | 5 microns |
| Repeatability - Manual | 10 microns |
| Repeatability - Motorised | 5 microns |
| Maximum Speed - Motorised | 10 mm.s-1 |
产品参数
