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021-58997868
021-58997868
PRODUCT CENTER
Omniax Z Slide Modules
The Omniax Z axis linear shift mechanism is a single bellows stand alone module, with hinged 114mm OD conflat top flange, two guide shafts positioned each side of the drive screw, encased in a strengthening outer shell to prevent twisting. This structure coupled with cast and precision machined flange supports allows the device to offer stability.
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021-58997868
Schematic
Robust, rigid construction
100mm to 1000mm travel (longer on request)
Large 54mm clear bore edge welded bellows
114mm OD conflat travelling flange
Ultimate stability for long Z travel manipulation
Anti-backlash drives
Hinged knee concept for initial assembly and test alignment
Cross roller slide-ways and recirculating ball linear guide bushes
Motorisation upgradable to Stepper motor or DC motor
Compatible with standard Conflat rotary drives
Large load capacity
Upgrade to Rotating support tube option.
Feedthrough chamber with 4 radial mini ports
Operating pressure 1 bar to 10-11 mbar
Leak rate <1x10-10 mbar l-s
10 micron resolution
10 micron repeatability
0.5 micron resolution
0.5 micron repeatability using 4 mm.s-1 maximum speed
| Omniax Z Slide - Basic Dimensions | |||
| Z Travel mm | A1 mm | C mm | Order Code and stp. file |
| 100 | 184 to 284 | 374 | MXZ100 |
| 200 | 186 to 386 | 477 | MXZ00 |
| 300 | - to 486 | 577 | MXZ300 |
| 400 | 186 to 586 | 677 | MXZ400 |
| 500 | - to 708 | 799 | MXZ500 |
| 600 | 229 to 829 | 920 | MXZ600 |
| 800 | 273 to 1073 | 1164 | MXZ800 |
| 1000 | 317 to 1317 | 1408 | MXZ1000 |
| Omniax Differentially Pumped Rotary Modules and Accessories | |
| DPRF Module | Order Code |
| DPRF55 with Coarse Manual Actuator | ZDPRF55 |
| DPRF55 with Precision Manual Actuator | ZDPRF55H |
| DPRF55 with Stepper Motor | ZDPRF55W |
| DPRF55 with Stepper Motor and encoder | ZDPRF55E |
| DPRF55 with DC Motor Fitted | ZDPRF55D |
| RP100 Module | Order Code |
| RP100 with Coarse Manual Actuator | ZRP100C |
| RP100 with Precision Manual Actuator | ZRP100H |
| RP100 with Stepper Motor | ZRP100W |
| RP100 with Stepper Motor and encoder | ZRP100E |
| RP100 with DC Motor Fitted | ZRP100DC |
| Accessories | Order Code |
| Axial Feedthrough Chamber | ZFECHA03 |
| Straight Connector for RP100 Mounting | ZBS1090 |
产品参数
